Deployment of electro-optic amplitude varying elements (AVEs) and electro-optic multi-functional elements (MFEs) in photonic integrated circuits (PICs)

ABSTRACT

Electro-optic amplitude varying elements (AVEs) or electro-optic multi-function elements (MFEs) are integrated into signal channels of photonic integrated circuits (PICs) or at the output of such PICs to provide for various optical controlling and monitoring functions. In one case, such PIC signal channels may minimally include a laser source and a modulator (TxPIC) and in another case, may minimally include a photodetector to which channels, in either case, an AVE or an MFE may be added.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of patent application, Ser. No.11/556,278, filed Nov. 3, 2006 and entitled, DEPLOYMENT OF ELECTRO-OPTICAMPLITUDE VARYING ELEMENTS (AVES) AND ELECTRO-OPTIC MULTI-FUNCTIONALELEMENTS (MFEs) IN PHOTONIC INTEGRATED CIRCUITS (PIC), which is adivision of patent application, Ser. No. 11/268,325, filed Nov. 7, 2005and entitled, DEPLOYMENT OF ELECTRO-OPTIC AMPLITUDE VARYING ELEMENTS(AVES) AND ELECTRO-OPTIC MULTI-FUNCTIONAL ELEMENTS (MFEs) IN PHOTONICINTEGRATED CIRCUITS (PICs), now U.S. Pat. No. 7,162,113 B2 issued Jan.9, 2007, which application claims the benefit of provisionalapplication, Ser. No. 60/625,322, filed Nov. 5, 2004; and further, whichapplication also is a continuation-in-part of subject matter disclosedin and claims priority to U.S. patent application, Ser. No. 10/267,331,filed Oct. 8, 2002 and entitled, TRANSMITTER PHOTONIC INTEGRATEDCIRCUITS (TxPIC) AND OPTICAL TRANSPORT NETWORKS EMPLOYING TxPICs, nowU.S. Pat. No. 7,283,694 B2, issued Oct. 16, 2007 Ser. No. 10/267,330,filed Oct. 8, 2002 and entitled, TRANSMITTER PHOTONIC INTEGRATED CIRCUIT(TxPIC) CHIP ARCHITECTURES AND DRIVING SYSTEMS AND WAVELENGTHSTABILIZATION FOR TxPICs, now U.S. Pat. No. 7,079,715 B2, issued Jul.18, 2006; and U.S. patent application, Ser. No. 10/267,304, filed Oct.8, 2002 and entitled, AN OPTICAL SIGNAL RECEIVER PHOTONIC INTEGRATEDCIRCUIT (RxPIC), AN ASSOCIATED OPTICAL SIGNAL TRANSMITTER PHOTONICINTEGRATED CIRCUIT (TxPIC) AND AN OPTICAL TRANSPORT NETWORK UTILIZINGTHESE CIRCUITS, now U.S. Pat. No. 7,116,851 B2, issued Oct. 3, 2006,and, further, claims priority to provisional patent application, Ser.No. 60/625,322, filed Nov. 5, 2004, all which above mentionedapplications are incorporated herein in their entirety by theirreference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates generally to photonic integrated circuits (PICs)and more particularly to the deployment of various kinds ofelectro-optic amplitude varying elements (AVEs) and/or electro-opticmulti-functional elements (MFEs) integrated in monolithic photonicintegrated circuits (PICs).

2. Description of the Related Art

This disclosure relates to photonic integrated circuits or PICs and theactive and passive elements that may be integrated in such circuits, inparticular, elements that are in addition to the primary functionalelements comprising the circuits. For example, in the above incorporatedpatent applications, there are disclosed transmitter photonic integratedcircuits or TxPICs and receiver photonic integrated circuits or RxPICsemployed in optical communication systems or networks. The TxPICsminimally include, in monolithic form, a plurality of signal channelsthat each includes a modulated source having a unique emissionwavelength or frequency, with their outputs coupled to an opticalcombiner that combines modulated source signal outputs into a single WDMsignal for output from the chip. The RxPICs minimally include, inmonolithic form, an input to an optical decombiner with multiple outputseach coupled to a photodetector. This disclosure fundamentally relatesto the addition of active elements to these circuits and theseadditional elements are collectively referred to as electro-opticamplitude varying elements (AVEs) and/or electro-optic multi-functionalelements (MFEs) to perform various other functions in the operation ofthe circuits.

An optical transmission network or an optical transport system islimited in performance due to several issues. The primary issues areoptical signal-to-noise ratio (OSNR) at both the optical transmitter andreceiver, the Q at both the optical transmitter and receiver, and thedynamic range of the optical receiver, i.e., the level of ability toreceive distorted channel optical signals and still interpret the datarepresented by the information modulated on the channel signals sentfrom the optical transmitter. This level of dynamic range at the opticalreceiver is a composite of many factors, such as, for example, the gainflatness of an optical amplifier just prior to the input of the opticalreceiver, which amplifier is usually a EDFA, the sensitivity variationin the optical transmitter and receiver, launch power variations in theoptical transmitter, wavelength dependent losses and insertion losses inthe optical transport system. The accumulative effect of the foregoingis to limit the overall reach of the optical transmission system or,alternatively, to increase the cost of the system. The optical receiverdynamic range is ultimately dictated by the noise and saturation effectsof the signal channel photodetectors, which receive a demultiplexedoptical channel signal for conversion into an electrical signal, and thenoise and saturation effect of the transimpedance amplifier (TIA)coupled to receive the photocurrent channel signal. This noise andsaturation effect can be quite large such as 5 dB to 15 dB, for example.

An important part of current day wavelength division multiplexing (WDM)transmission systems is the monitoring of system parameters that areindicative of impairments in the system such a per channel signal power,per channel wavelength stabilization, channel power level across anarray of signal channels with an eye toward power equalization as wellas gain tilt across the channel gain spectrum with gain tilt beingsignificantly imposed on the channel signals by optical fiberamplifiers, such as EDFAs.

Also, in a WDM communication system, since each modulated signal channelis allocated a different wavelength that together approximate astandardized wavelength grid, the different wavelengths experiencedifferent delay effects in propagation in the optical medium or fiber aswell as nonlinear effects of stimulated Raman scattering in the fiber sothat when the channel signals are received on the optical receiver sideof the system, the modulated channel signals have experienced chromaticdispersion due to both the characteristics of the fiber medium and alsothe gain characteristics and gain slope of a mid-span optical fiberamplifier. Thus, it is desired that optical power levels of the channelsignals be equalized as they emerge from the transmitter. Even if thetransmitted channel signals are equalized, they arrive at the receiverdistorted with variations among the optical signal levels resulting inan unacceptable level of transmission errors. The transmissioncharacteristic brought about by the foregoing effects is measured by theoptical signal-to-noise ratio or OSNR as viewed at the optical receiver.The OSNR is improved by the deployment of pre-emphasis technology byadjusting, on the transmission side, the amplitude profile of thechannel signals across the channel wavelength spectrum where suchadjustment takes into account the dispersion characteristics of thefiber medium and/or the gain characteristics of link optical fiberamplifiers. The gain characteristics of an EDFA are typically strongestin the center of its gain spectrum so that in the pre-emphasized state,the pre-emphasis performed on the transmitter side would be an oppositegain spectrum across the channel signal array where the center channelwould have the lowest power and extending to either side of the centerthe gain profile across those channels would monotonically increase sothat the outside channels of the array will end up with the mostinitially applied gain.

In order to either equalize the channel or transmission signals,attenuators or amplifiers in combination with attenuators are deployed.It is known in the art to utilized variable optical attenuators (VOAs)by themselves or in combination with semiconductor optical amplifiers(SOAs) particularly for the purposes of providing signal equalizationacross an array of signals. A good example of the state of the art isdisclosed in U.S. Pat. No. 6,271,945 where discrete devices are employedfor discrete trains of electro-optic elements or components for eachsignal channel as seen in FIGS. 9 and 10, for example, of this patent.The elements comprise a discrete array of laser sources operating atdifferent channel wavelengths and each coupled to an external modulatorwhich is coupled, via a coupler to a corresponding attenuator in oneembodiment (FIG. 9) or to a correspond amplifier (FIG. 12) in anotherembodiment. After multiplexing of the signal channels, a portion of thesignal is tapped off to a spectrum analyzer to determine the power levelof each channel signal. If any adjustment is necessary to equalize thechannel signals relative to one another, a control circuit is employedto adjust the attenuation or gain level of a respective signal channelvia its attenuator or amplifier to bring the channels back intoequalization. In U.S. Pat. No. 6,282,361, an integrated multi-channeloptical attenuator comprising an array of attenuators, e.g., aMach-Zehnder interferometer (MZI), is disclosed where the channelsignals provided as an input to the attenuator are equalized across achannel array via a per channel attenuator.

While the interest in this application is the deployment of such opticalgain equalizing elements or components in monolithic photonic integratedcircuits or PICs, this is not to say that there have not beensuggestions of such in the art. For example, in FIG. 13 of U.S. PatentApplication Pub. No. US2002/0109908A1, published Aug. 15, 2002, amonolithic device that includes a double pass multiplexer/demultiplexerthat has a common input/output is illustrated in combination with a SOAand a VOA in each signal channel which, respectively, increase anddecrease signal intensity so that the overall intensity level of allsignals across the channel signal array are substantially uniform. TheSOA in each channel increases the gain in the channel by increasing thebias on the amplifier which induces population inversion to bring aboutoptical gain to a channel signal traversing the amplifier. In a VOA, theapplication of an applied negative or reverse junction bias brings aboutoptical absorption and the amount of absorption of a channel signaltraversing the attenuator is determined by the amount of reverse biasthat is applied to the device in conjunction with, of course, theabsorption length of the device. As indicated in this publicationrelative to one mode of operation, the frequency response of the VOAs ishigher compared to that of SOAs so that the channel signals can be firstamplified to higher values greater than the required minimum so that therapid response of the several VOAs can be utilized to quickly achieveequalization across the array of channel signals. The publication,WO02/098026A1, published Dec. 5, 2002, shows a similar double passdevice multiplexer/demultiplexer but without the deployment of SOAs.

Another aspect in the utilization of PICs is the optimum placement ofintegrated amplitude varying elements (AVEs) in the signal channels ofan array of modulated sources, such as an integrated modulated laser ineach channel on the PIC or an integrated laser source and externalelectro-optic modulator in each channel on the PIC. AVEs such as SOAs,VOAs, ZOAs (combination SOA/VOAs) or monitoring photodetectors (PDs)functioning also as a reverse bias AVEs or like VOAs when placed indifferent locations in PIC signal channel paths can have detrimentalaffects on the channel modulated signal. As an example, in the casewhere the array of laser sources, whether DFB lasers or DBR lasers, forma plurality of signal channels in a transmitter photonic integratedcircuit (TxPIC), it may be desired to operate the laser sources at aconstant bias current above their respective thresholds while providinga feedback system to stabilize their wavelength operations over lifesuch as disclosed in Pub. No. US 2003/0095736 A1, supra. In order toaccomplish constant output from the constant bias current laser sourcesover life, it is necessary to control their power output across thechannel array to be substantially uniform. In order to accomplish thistask, some type of AVE can be included in each signal channel path sothat the output power of modulated signals from each channel to theon-chip optical combiner are all substantially at the same power level.However, the added channel AVEs may have some affect one the opticalmodulated signal shape and the signal optical spectrum so that itbecomes important as to where such AVEs may be placed in the signalchannel paths to achieve optimum performance in terms of modulatedsignal output substantially unaffected by AVE operation.

SUMMARY OF THE INVENTION

According to one feature of this invention, a monolithic photonicintegrated circuit (PIC) comprises an integrated array of primary levelelectro-optic elements formed as a plurality of signal channels in thecircuit and including in those signal channels at least one additionalelectro-optic element comprising an electro-optic amplitude varyingelement (AVE) and /or a electro-optic multi-functional element (MFE).

Another feature of this invention is a monolithic photonic integratedcircuit (PIC) comprises an integrated array of electro-optic elementsformed as a plurality of signal channels in the circuit, with eachsignal channel including at least a laser source, an electro-opticmodulator and an electro-optic amplitude varying element (AVE).Variation of a bias current to the respective electro-optic amplitudevarying elements (AVEs) results in substantial uniform power across thearray of channel signals. The electro-optic amplitude varying elements(AVEs) may be a variable optical attenuator (VOA), a semiconductoroptical amplifier (SOA), an in-series variable optical attenuator (VOA)and a semiconductor optical amplifier (SOA), or a combination variableoptical attenuator/semiconductor optical amplifier, as referred toherein as a “ZOA”, as will be explained later in more detail. Also, morethan one AVE may be provided in each signal channel of the circuit onebefore the electro-optic modulator and/or one after the electro-opticmodulator in each signal channel.

Another feature of this invention is a monolithic photonic integratedcircuit (PIC) that comprises an integrated array of electro-opticelements formed as a plurality of signal channels in the circuit, eachsignal channel including at least a laser sources for producingcontinuous wave light, an electro-optic modulator to modulate the lightto produce a modulated optical signal and a multi-function element (MFE)which performs at least two separate electrical or electro-opticfunctions relative to the modulated optical signal in each signalchannel through interaction with the optical signal propagating throughthe multi-function element (MFE). In general, the MFE in a PIC channelmay perform the dual function selected, for example, from the group ofcontrolling the light in some manner (e.g. amplification orattenuation), modulating the light in some manner such as with a tonefrequency, and monitoring the power of the light. Such a dual functionmay be performed by a variable optical attenuator (VOA) or aphotodetector (PD); a variable optical attenuator (VOA) or asemiconductor optical amplifier (SOA); a combination variable opticalattenuator (VOA) and a semiconductor optical amplifier (SOA), which isalso referred to as a ZOA; or a ZOA or a photodetector (PD). Themulti-function element (MFE) may be at an output of the electro-opticmodulator in each of the signal channel paths on the PIC chip or betweenthe laser sources and the electro-optic modulator in each of the signalchannel paths on the PIC chip or at both such locations.

Another feature of this invention is a monolithic photonic integratedcircuit (PIC) that comprises an integrated array of electro-opticelements formed as a plurality of signal channels in the circuit, eachsignal channel including at least a laser source and an electro-opticmodulator to provide a respective modulated optical signal, an opticalcombiner coupled to receive the modulated optical signals from thesignal channels and combine them into a single WDM signal, or what maybe referred to as an optical signal group (OSG), and also, optionally,at least one electro-optic amplitude varying element (AVE) between theoptical combiner and an output for the circuit. The electro-opticamplitude varying element (AVE) may be an in-series or in-tandemsemiconductor optical amplifier (SOA) and variable optical attenuator(VOA) or a Mach-Zehnder interferometer (MZI); a combination variableoptical attenuator (VOA) and a semiconductor optical amplifier (SOA),also referred to as a ZOA; an in-series or in-tandem multi-functionelement (MFE) and an variable optical attenuator (VOA) or asemiconductor optical amplifier (SOA) or ZOA; an in-series or in-tandemfirst and second semiconductor optical amplifiers (SOAs); an in-seriesor in-tandem first and second variable optical attenuator (VOAs); or anin-series or in-tandem first and second ZOA. In cases where asemiconductor optical amplifier (SOA) is employed, a gain-clamped SOA(GC-SOA) may alternatively be considered in place of an SOA. A furtherelectro-optic amplitude varying element (AVE) may be provided in eachsignal channel either between the laser source and the electro-opticmodulator in each of the signal channels or at an output of theelectro-optic modulator in each of the signal channels or in bothlocations to compensate for gain tilt that may be experienced by a WDMsignal at the circuit output as provided to an off0chip opticalamplifier, such as, for example, an EDFA.

Another feature of this invention is a monolithic photonic integratedcircuit (PIC) that comprises an circuit input for receiving a WDM signalfrom an optical link, an optical decombiner for decombining the WDMsignal into a plurality of separate channel signals each on a respectiveoptical output waveguide or channel from the optical combiner, an arrayof photodetectors (PDs) each coupled to a respective channel signal fromthe optical decombiner and an electro-optic amplitude varying element(AVE) in each signal channel or waveguide between the optical decombinerand a respective photodetector. The electro-optic amplitude varyingelement (AVE) may be a variable optical attenuator (VOA), asemiconductor optical amplifier (SOA), an in-series or in-tandemvariable optical attenuator (VOA) and a semiconductor optical amplifier(SOA), or a combination variable optical attenuator (VOA) and asemiconductor optical amplifier (SOA), also referred to as a ZOA.

The VOAs may be designed as either electro-absorption VOAs or bandedgeVOAs. The same is true for the designs of the PDs.

The above-mentioned optical decombiner may be a arrayed waveguidegrating (AWG), an Echelle grating, a cascaded Mach-Zehnderinterferometer, quasi-selective wavelength star coupler, a powercoupler, a star coupler, or a multi-mode interference (MMI) coupler.

More particularly, according to this invention, an array of variableoptical attenuators (VOAs) are provided in an optical transmitterphotonic integrated circuit (TxPIC) where each VOA is respectivelyinserted in each signal channel path comprising a train of electro-opticelements between an electro-optic modulator and an input to an WDMmultiplexer or combiner to attenuate the modulated channel signals sothat they are substantially equal in power with other modulated channelsignals that are all provided as signal inputs to the opticalmultiplexer or combiner.

More particularly, according to this invention, an array of variableoptical attenuators (VOAs) are provided in an optical receiver photonicintegrated circuit (RxPIC) where each VOA is respectively inserted in asignal channel or waveguide between a WDM signal demultiplexer ordecombiner and a corresponding channel photodetector. The VOA employsper channel information from a corresponding transimpedance amplifier(TIA) coupled to the output of each photodetector, for example, to setthe bias value of the VOA to insure that each channel signal remainswithin the dynamic range of the optical receiver and does not saturateeither the photodetector or the TIA. As a result, the opticaltransmission network connected to the optical receiver can afford fargreater dynamic range variations when the on-chip VOA attenuation isemployed thereby extending the signal reach by improving the OSNR and/orreducing the amount of control, necessary specifications, and costs ofthe optical transmission system in the optical receiver. The VOA isoperated with a reverse bias applied to optimize the dynamic range foreach channel signal. The attenuation reduces the noise floor renderingthe TIA to be more definitively define the sinusoidal or square voltageoutput from the photodetectors representative of binary values of “1”and “0” in the optically converted electrical signal. The VOA may be anelectro-absorption type of VOA or may be a Mach-Zehnder phase type ofVOA. A bandedge VOA functions like a reverse bias PIN photodiode whichoperates in the region of its bandedge. The VOA may also have a shiftedbandgap in its active region so that the amount of signal lossaccomplished by a given applied negative voltage will be enhanced.Further, the VOA may be a combination semiconductor opticalamplifier/variable optical attenuator (SOA/VOA), also referred to,herein, as a ZOA, where a ZOA is a single electro-optic componentdesigned to operate either as an optical amplifier (SOA) or an opticalattenuator (VOA) depending upon the bias sign applied to the ZOA. A ZOAprovides for even greater enhancement of the optical receiver dynamicrange as well as sensitivity compared to either a VOA or SOA employed byitself.

More particularly, according to this invention, at least oneelectro-optic amplitude varying element (AVE) at the WDM optical signaloutput of a WDM multiplexer or combiner in a multi-channel opticaltransmitter photonic integrated circuit (TxPIC) chip in an opticaltransmission module having a plurality of such TxPIC chips where eachon-chip output AVE controls the gain level of the WDM or optical signalgroup (OSG) signal in each chip output to provide for uniformity withother such OSG output signals from other TxPICs in the module where theWDM signal outputs are further optically combined or interleaved priorto transmission on an optical medium or fiber. Such chip output AVEseither amplify or attenuate the WDM signal output, such as might beaccomplished with electro-optic element combinations of a variableoptical attenuator (VOA), semiconductor optical amplifier (SOA), again-clamped semiconductor optical amplifier (GC-SOA), Mach-Zehnderinterferometer (MZI) or a multi-mode interferometer (MMI) switch.

Another feature of this invention is the utilization of AVEs in thesignal channels of a TxPIC to provide for signal output equalizationacross the signal channel array without unduly distorting the modulatedsignals provided to the on-chip optical combiner. For example, forimproved wavelength stability over life, each laser source, such as aDFB laser or DBR laser, is operated at a constant bias current. Eachsignal channel on the TxPIC includes a front photodetector (FPD) formonitoring the output power of each PIC channel. Each channel may alsoinclude a back photodetector (BPD) to monitor the power output of thelaser source itself. Also, the front photodetector (FPD) of each channelalso controls the average power in each channel so the power output fromall signal channels across the channel array are substantially the same.Further, the FPD may be modulated with a low frequency tone as taught inPub. No. US 2003/0095736 A1, supra. Average channel power is controlledby varying the reverse bias voltage applied to the front photodetector(FPD). Such FPDs and BPDs may be, for example, a PIN photodiode or anavalanche photodiode.

As the laser sources age, their output power changes which alters theincident optical power to the electro-optic modulator, such as to anelectro-absorption modulator (EAM) or a Mach-Zehnder modulator (MZM), ineach signal channel path on the TxPIC. The resulting changes inphotocurrent in the electro-optic modulator can shift the bias point ofthe electro-optic modulator, thereby altering chirp, extinction ratioand waveform distortion with respect to conditions set optimally at thebeginning of life for the on-chip modulators. Modulated light outputfrom the electro-optic modulator passes through the FPD before on-chipmultiplexing occurs. When the FPD reverse bias is varied to control theindividual channel power, for example, to compensate for changing lasersource output power, the waveform created by the electro-optic modulatorcan be altered by a charge transport phenomena occurring at the FPD.This can affect the fidelity of the transmitted waveform therebyintroducing changes in the bit error rate (BER) at an optical receiveras the FPD bias changes relative to conditions set optimally at thebeginning of life for the respective modulators.

To avoid the foregoing problems, the following sequence of functionalAVEs in each signal channel of the TxPIC is prescribed where, followingthe laser source, the next AVE is the FPD, followed by the electro-opticmodulator. With this sequence of integrated elements in each signalchannel, particularly in the case where the laser sources are driven atconstant bias current for improved wavelength stability, changes oflaser source output power can be compensated for by changing the FPDinsertion loss, resulting in approximately constant channel output poweracross the signal channel array as well as approximately constant inputpower to the respective electro-optic modulator over life. In thismanner, the conditions that optimize transmission performance atbeginning of life remain approximately unchanged over the life of theTxPIC. Additionally, the modulated light output from the electro-opticmodulator only propagates through passive optical elements in the TxPICarchitecture, e.g., the optical combiner, thereby avoiding possiblewaveform degradation associated with charge transport phenomenaoccurring in a downstream AVE channel element, such as a photodetector,i.e., downstream of the electro-optic modulator. Thus, through thisarchitecture, channel power control is made more independent frominteraction with waveform generation (digital or analog modulation) fordata transport.

Also, any back reflection from a butt joint formed during circuitfabrication existing along the channel path can be circumvented withimproved optical isolation of the laser source. In some fabricationtechniques utilizing MOCVD, for example, with selective area growth orSAG, a butt joint may be formed between the front photodetector (FPD)and the electro-optic modulator. There are other examples of such formedbutt joints that may be formed in “stop and then regrow” techniquesalong the signal channels formed in a TxPIC, such as, for example,between the active channel elements and their inputs to the passiveoptical combiner. In any case, the insertion loss of the FPD provided atthe laser source output can aid to isolate the laser source from suchback reflections from such butt joints as well as from the affects ofmodulated back reflections passing through a signal channelelectro-optic modulator from a downstream butt joint.

On the other hand, SOAs, rather than VOAs or photodetectors functioningas a VOA, may be employed for power equalization across the channelarray. In this case, however, back reflections in the signal channelsmay be amplified rather than attenuated, as in the case of VOAs or FPDs,so that it may be preferred to include an integrated, optical waveguideisolator in each channel to protect the channel laser source from backreflections that may cause the laser source from becoming unstable, inparticular, change its emission wavelength or its optical spectrum. Suchoptical waveguide isolators are known in the art particularly asdiscrete active or passive elements and find uses in opticalcommunication systems. The purpose of an optical isolator is toeliminate unwanted or reflected optical signals from interfering with adesired optical function. For example, an optical waveguide isolator maybe inserted in an optical signal path between a distributed feedback(DFB) laser and an optical fiber. Without the isolator, unwanted opticalsignals (i.e., reflections) from the optical fiber would couple backinto the DEB laser and adversely affect its transmitted opticalspectrum. By including an isolator in such situations, unwantedreflected signals are absorbed by the isolator and do not reach thelaser source. Such optical isolators have not been proposed or used inconjunction with TxPICs.

Other objects and attainments together with a fuller understanding ofthe invention will become apparent and appreciated by referring to thefollowing description and claims taken in conjunction with theaccompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

In the drawings wherein like reference symbols refer to like parts:

FIG. 1 is a plan view of a multi-signal channel, optical transmitterphotonic integrated circuit (TxPIC) chip comprising a first embodimentof this invention utilizing a per channel AVE comprising VOA after theelectro-optic modulator in each signal channel.

FIG. 1A is schematic diagram of a one of the signal channels in theTxPIC chip shown in FIG. 1.

FIG. 2 is a plan view of a multi-signal channel, optical transmitterphotonic integrated circuit (TxPIC) chip comprising a second embodimentof this invention utilizing a per channel AVE comprising VOA before theelectro-optic modulator in each signal channel.

FIG. 3 is a plan view of a multi-signal channel, optical transmitterphotonic integrated circuit (TxPIC) chip comprising a third embodimentof this invention utilizing a per channel AVE comprising SOA after theelectro-optic modulator in each signal channel.

FIG. 4 is a plan view of a multi-signal channel, optical transmitterphotonic integrated circuit (TxPIC) chip comprising a fourth embodimentof this invention utilizing a per channel AVE comprising SOA before theelectro-optic modulator in each signal channel.

FIG. 5 is a plan view of a multi-signal channel, optical transmitterphotonic integrated circuit (TxPIC) chip comprising a fifth embodimentof this invention utilizing a per channel AVE comprising a combinationof a SOA and VOA or a ZOA after the electro-optic modulator in eachsignal channel.

FIG. 6 is a plan view of a multi-signal channel, optical transmitterphotonic integrated circuit (TxPIC) chip comprising a sixth embodimentof this invention utilizing a per channel AVE comprising combination ofa SOA and VOA or a ZOA before the electro-optic modulator in each signalchannel.

FIG. 7 is a plan view of a multi-signal channel, optical transmitterphotonic integrated circuit (TxPIC) chip comprising a seventh embodimentof this invention utilizing a per channel AVE comprising combination ofa SOA, VOA or ZOA before and after the electro-optic modulator in eachsignal channel.

FIG. 8 is a plan view of a multi-signal channel, optical transmitterphotonic integrated circuit (TxPIC) chip comprising a eight embodimentof this invention utilizing a per channel multifunction element (MFE)after the electro-optic modulator in each signal channel.

FIG. 9 is a plan view of a multi-signal channel, optical transmitterphotonic integrated circuit (TxPIC) chip comprising a ninth embodimentof this invention utilizing a per channel multifunction element (MFE)before the electro-optic modulator in each signal channel.

FIG. 10 is a plan view of a multi-signal channel, optical transmitterphotonic integrated circuit (TxPIC) chip comprising a specificembodiment of the ninth embodiment of this invention utilizing a perchannel multifunction element (MFE) or amplitude varying element (AVE),in particular a photodetector (PD) or VOA before the electro-opticmodulator in each signal channel.

FIG. 11 is a plan view of a multi-signal channel, optical transmitterphotonic integrated circuit (TxPIC) chip comprising a specificembodiment of the second embodiment of this invention utilizing a perchannel amplitude varying element (AVE), in particular a SOA and opticalisolator before the electro-optic modulator in each signal channel.

FIG. 12 is a plan view of a multi-signal channel, optical transmitterphotonic integrated circuit (TxPIC) chip comprising a tenth embodimentof this invention utilizing one or more amplitude varying elements(AVEs) after the combiner or multiplexer in each signal channel.

FIG. 13 is a schematic diagram of a transmitter module having aplurality of TxPIC chips of a type shown in FIG. 10 with at least oneoutput AVE where there WDM output signal or the optical signal group(OSG) signal from each chip are equalized with one another prior tobeing combined or interleaved for transmission on an optical link.

FIG. 14 is a plan view of a multi-signal channel, optical receiverphotonic integrated circuit (RxPIC) chip comprising a eleventhembodiment of this invention utilizing a per channel AVE comprising aVOA after the decombiner but before the photodetector (PD) in eachsignal channel.

FIG. 15 is a plan view of a multi-signal channel, optical receiverphotonic integrated circuit (RxPIC) chip comprising a twelfth embodimentof this invention utilizing a per channel AVE comprising a ZOA after thedecombiner but before the photodetector (PD) in each signal channel.

FIG. 16 is a plan view of a multi-signal channel, optical receiverphotonic integrated circuit (RxPIC) chip of the embodiment of eitherFIG. 11 or FIG. 12 of this invention having a feedback control circuitfor varying the bias applied to a signal channel VOA, SOA or ZOA toenhance responsivity of the photodetectors without saturating them orthe connected transimpedance amplifier (TIA).

FIG. 17 is a plan view of a multi-signal channel, optical receiverphotonic integrated circuit (RxPIC) chip comprising a thirteenthembodiment of this invention utilizing a per channel AVE comprising acombination of a SOA and VOA after the decombiner but before thephotodetector (PD) in each signal channel.

DETAILED DESCRIPTION OF THE INVENTION

Reference is now made to FIG. 1 comprising a photonic integrated circuit(PIC), here also referred to as a transmitter PIC or TxPIC 10 to whichthe features of this invention may be applied. It should be noted thatsome of the attributes of this invention are equally applicable to anyother PICs, such as optical receiver photonic integrated circuit (RxPIC)chips which are disclosed in U.S. patent application, Ser. No.10/267,304, supra, examples of which are also discussed in laterdescribed embodiments, and any other such PICs having integrated activeor electro-optic components as well as one or more passive opticalcomponents.

TxPIC chips 10 as well as such PIC chips in other embodiments disclosedare an In-based chip, various details of which are disclosed in U.S.patent application, Ser. No. 10/267,331, supra. As shown in FIG. 1,monolithic PIC chip 10 comprises groups of integrated and opticallycoupled active and passive components formed in a series of signalchannels, identified as channel Nos. 1 through 10 in FIG. 1, whereineach signal channel includes a laser source 12, such as a DFBsemiconductor laser or a DBR semiconductor laser. Each laser source 12operates at a different emission wavelength, λ₁−λ_(N) where N in theexemplary embodiment here is equal to ten, where the group ofwavelengths provides a wavelength grid with predefined grid channelspacing that may be commensurate with a standardized wavelength grid,such as the ITU wavelength grid. However, such a wavelength grid mayalso be a non-standard wavelength grid or a wavelength grid withnonuniform channel spacing. On the other hand, the wavelength grid neednot be of any particular standard. Laser sources 12 are respectivelyprovided with an associated electro-optic modulator 14 as shown inFIG. 1. Thus, the CW outputs of laser sources 12 are shown opticallycoupled to respective electro-optic modulators 14. Modulators 14 may beelectro-absorption modulators (EAMs) or Mach-Zehnder modulators (MZMs)as detailed in patent application, Ser. No. 10/267,331, supra. It iswithin the scope of this invention that rather deploying modulators 14,laser sources 12 may be directly modulated. Thus, channel “modulatedsources” may be defined as a modulated laser source or a CW operatedlaser source with a modulated external modulator.

Modulators 14 each apply an electrical modulated signal to the CW lightfrom laser sources 12 producing an optical modulated signal fortransmission on an optical link of an optical transmission network. Themodulated channel outputs from modulators 14 may be optically coupled toa front photodetector (FPD) 16F for the purposes of monitoring theoutput power or signal characteristics received from the modulators 14.The on-chip deployment of FPDs 16F is optional. FPDs 16F may also befabricated off-axis of the channel of in-tandem optical train elementsby means of an on-chip channel optical tap to provide a small portion ofthe modulated output to the offset photodetector. Also, shown in FIG. 1for each signal channel are back photodetectors (BPDs) 16B formonitoring light from the back facet of laser sources to aid in orprovide for the determination of laser CW output power in each signalchannel. FPDs 16F and BPDs 16B may be PIN photodiodes, MSMphotodetectors, or avalanche photodiodes (APDs). Also include in eachsignal channel is an electro-optical amplitude varying element (AVE) 15which is illustrated in this embodiment as a variable optical attenuator(VOA). More will be said later about this element. While in this andother embodiments, the train of elements is numerically identified foronly channel 1 in the figures, it should be understood in thisdescription that they are the same for all the remaining signal channels2 through 10.

As indicated above and as explained in more detail in patentapplication, Ser. No. 10/267,331, supra, modulators 14 may be fabricatedas electro-absorption modulators (EAMs), Mach-Zehnder modulators (MZMs)or bandedge Mach-Zehnder modulators. The modulated optical signaloutputs of modulators 14, via FPDs 16F, are respectively coupled, viawaveguides 18(1) . . . 18(10), to an on-chip wavelength selectivecombiner, shown here as an arrayed waveguide grating or AWG 20.Waveguides 18(1) . . . 18(10) receive the modulated channel signals fromthe N channels and provide them as an input to AWG 20. It is within thescope of this invention that combiner 20, or later on describeddecombiners, may be another type of wavelength-selective combiner ordecombiner, as the case may be, such as Echelle gratings, cascadedMach-Zehnder interferometers (MZIs), broadband multiplexers of the typeshown, for example, in U.S. Pat. No. 6,580,844 (which is alsoincorporated herein by its reference), so-called free-space diffractiongratings (FSDGs) or quasi-selective wavelength star couplers having amultimode coupling region comprised of waveguides as disclosed in U.S.patent application, publication No. US 2003/0012510 A1 (which patentapplication is also incorporated herein by its reference). Theemployment of such wavelength-selective combiners or multiplexers ismore conducive to high channel signal counts on TxPIC chips. However, itis within the scope of this invention to practice the invention inconnection with couplers, such as power couplers, star couplers or MMIcouplers which can be employed in particular circumstances. Each of thelaser source/modulator combinations is, therefore, representative of anoptical signal channel on TxPIC chip 10 and there may be, for example,as many as forty signal channels or more on TxPIC 10. As previouslyindicated, there are N channels on each TxPIC chip 10 and, in the casehere, ten such channels are shown as numbered one through ten in FIG. 1.There may be less than 10 channels or more than 10 channels formed onchip 10. In FIG. 1, the output of each signal channel from a respectivechannel laser/modulator is coupled to a respective waveguide 18(1) to18(10) which is optically coupled to the zero order Brillouin zone inputof AWG 20.

Each signal channel is typically assigned a minimum channel spacing orbandwidth to avoid unacceptable crosstalk with other optical channels.Currently, for example, 50 GHz, 100 GHz, or 200 GHz are common channelspacings between signal channels. The physical channel spacing orcenter-to-center spacing 28 of the signal channels may be 100 μm to1,000 μm or more to minimize electrical or thermal cross-talk at datarates, for example, of 10 Gbit per second or greater and facilitaterouting of interconnections between bondpads of multiple PIC opticalcomponents or elements. Although not shown for the sake of simplicity,bonding pads may be provided in the interior of PIC chip 10 toaccommodate wire bonding to particular on-chip electro-optic componentsin addition to bond pad groups 13 comprising chip edge-formed bondingpads.

Metal interconnects between bondpads (not shown) and electro-opticcomponents are at least partly formed on a surface of an isolation orpassivation medium deposited over PIC chip 10. A dielectric medium isoften employed to passivate and to provide for uniform planarization ofthe surface of chip 10. Such a passivation medium may be, for example,SiO_(x), SiN_(x), polyimide, BCB, ZnS, ZnSe or SOG or as combination ofone or more of the foregoing mediums.

As indicated above, the respective modulated outputs from electro-opticmodulators 16 are coupled into optical waveguides 18(1) to 18(10) to theinput of AWG 20 as shown in FIG. 1. AWG 20 comprises an input free spaceregion 19 coupled to a plurality of diffraction grating waveguides 21which are coupled to an output free space region 22. The multiplexedoptical signal output from AWG 20 is shown as provided to a plurality ofoutput waveguides 23 which comprises output verniers along the zeroorder Brillouin zone at output face 22A of output free space region 22of AWG 20. However, this is optional and the output may be to a singleoutput. Output waveguides 23 extend to output facet 29 of TxPIC chip 10where a selected vernier output 23 may be optically coupled to an outputfiber (not shown). The vernier outputs may also be disposed at a smallangle relative to a line normal to the plane of output facet 29 toprevent internal reflections from facet 29 back into vernier outputs 23that may affect stabilized laser wavelength operation. The deployment ofmultiple vernier outputs 23 provides a means by which the best oroptimum output from AWG 20 can be selected having the best match of thewavelength grid passband of AWG 20 with the established wavelength gridof the group of channel signal outputs from the array of laser sources12. Seven vernier outputs 23 are shown in FIG. 1. It should be realizedthat any number of such vernier outputs may be utilized beginning withthe provision of two of such vernier outputs. Also, the number of suchvernier outputs may be an odd or even number.

In operation, AWG 20 receives N optical signals, λ₁−−λ_(N), from coupledinput waveguides 18 which propagate through input free space region 19where the wavelengths are distributed into the diffraction gratingwaveguides 21. The diffraction grating waveguides 21 are plurality ofgrating arms of different lengths, ΔL, relative to adjacent waveguides,so that a predetermined phase difference is established in waveguides 21according to the wavelengths λ₁−λ_(N). Due to the predetermined phasedifference among the wavelengths in grating arms 21, the focusingposition of each of the signals in grating arms 21 in output free spaceregion 22 are substantially the same so that the respective signalwavelengths, λ₁−λ_(N), are focused predominately at the center portionor the zero order Brillouin zone of output face 22A. Verniers 23 receivevarious passband representations of the multiplexed signal output fromAWG 20. Higher order Brillouin zones along output face 22A receiverepeated passband representations of the multiplexed signal output atlower intensities. The focus of the grating arm outputs to the zeroorder Brillouin zone may not be uniform along face 22A due toinaccuracies inherent in fabrication techniques employed in themanufacture of chip 10. However, with multiple output verniers, anoutput vernier can be selected having the best or optimum combined WDMsignal output in terms of power and responsivity.

Turning attention again to electro-optic amplitude varying elements(AVEs) 15 in FIG. 1, this element may be a variable optical attenuator(VOA) as shown in FIG. 1, but also may be a semiconductor opticalamplifier (SOA), an in-series or in-tandem variable optical attenuator(VOA) and a semiconductor optical amplifier (SOA), or a combination,variable optical attenuator/semiconductor optical amplifier, which wealso refer to as a ZOA, meaning that is a combined SOA/VOA and operatesas either as a gain element or a passive element depending upon whetherthe applied bias is positive or negative, respectively. In FIG. 1, VOA15 follows electro-absorption modulator (EAM) 14. In this situation, thearray of VOAs 15 provide for pre-emphasis directly on chip 10 across thearray of channel signals so that the output modulated signals from EAMs14 are all approximately at the same power level upon entering the inputto AWG 20. As seen in FIG. 1A, VOA 15 in each signal channel 1 to 10 canoperate to change the signal amplitude in a channel by employingmonitoring FPD 16F to provide an output in the form of a monitoringsignal proportional to signal power to system control circuit 40 whichcompares the same monitoring signals from other FPDs 16F in other signalchannels to provide, for example, signal attenuation to those channelsignals having higher signal strength over the weakest of all suchchannel signals. Where such attenuation is necessary, circuit 40, asseen in FIG. 1A, provides a control signal to VOA bias control circuit41 to respective VOAs 15 which can correspondingly reduce the channelsignal strength by increasing the negative bias on VOA 15 in each signalchannel. System control circuit 40 can also receive optical signal tonoise (OSNR) data from an optical receiver in the optical transmissionnetwork relative to the transmitted channel signals, λ₁ to λ_(N), andthe OSNR can be improved by reducing or increasing the channel signalpower in certain signal channels via VOA bias control circuit 41.

FIG. 1A also illustrates other control circuits for signal channelelements such as laser driver circuit 42 for controlling the biascurrent to LD 12 and a bias control circuit 43, zero crossing controlcircuit 44 and a peak-to-peak control circuit 45 that provide voltagecontrol inputs to circuit driver 46 for modulator 14. This controlcircuitry is discussed in more detail in U.S. patent application, Ser.No. 10/267,330, supra. As previously indicated, BPD 16B provides forfeedback control via system control circuit 40 to control the biascurrent to laser source 12 to maintain its optical output power at apredefined output level via driver 42. In this manner, the laser sources12 may be driven through life at a constant bias current which ishelpful in separating the function of laser source output power from thefunction of maintaining laser source emission wavelength to a predefinedvalue, as will be explained in more detail later.

Reference is now made to the second embodiment shown in FIG. 2comprising TxPIC chip 10A which is identical to FIG. 1 except theelectro-optic amplitude varying element (AVE) shown here in the form ofvariable optical attenuator 15 is illustrated as positioned in eachsignal channel between laser source 12 and electro-optic modulator 14. Aprimary reason for placing VOA 15 before modulator 14 is that, placed inthe position as illustrated in FIG. 1, VOA 15 may possibly degrade the Qquality or provide a Q penalty to the modulated signal output frommodulator 14 including possibly some phase change to the signal. Morewill be said about this in connection with the embodiment shown in FIG.10. Again, the system control circuit 40 may be employed in FIG. 2 aswell as in other described embodiments to provide for pre-emphasis inthe manner described in connection with that figure.

Reference is now made to a third embodiment of this invention in FIG. 3comprising TxPIC chip 10B which is the same as the first embodiment inFIG. 1 except that the electro-optic amplitude varying element (AVE)illustrated here is a semiconductor optical amplifier (SOA) 19 placed ineach signal channel 1 to 10 after modulator 14. The function of SOA 19is to provide equalization across the array of λ₁−λ_(N) channels byamplifying those modulated signals that are below a desired power levelor to apply gain to N−1 channel signals as necessary to increase thesignal gain to that of the naturally highest gain signal channel. Itshould be noted that with an SOA 19 or a VOA 15 provided after modulator14, these amplitude varying elements (AVEs) may add an additional chirpto the channel modulated signal which may, in some cases, be usedadvantageously to predistort the signal to achieve some dispersioncompensation toward improving the BER at the optical receiver across theoptical transport link as well as function to apply or attenuate thechannel signals.

Reference is now made to a fourth embodiment of this invention shown inFIG. 4 comprising TxPIC chip 10C which is the same as the thirdembodiment in FIG. 3 except that semiconductor optical amplifier (SOA)19 placed in each signal channel before modulator 14. Care must be takenin the implementation of this embodiment that SOA 19 is not sufficientlybiased as to place modulator 14 into saturation. More is said about thisembodiment later on in connection with the embodiment of FIG. 11.

Reference is now made to a fifth embodiment of this invention shown inFIG. 5 comprising TxPIC chip 10D which is a combination of the first andthird embodiments where both a SOA 19 and VOA 15 are placed in eachsignal channel after modulator 14. Their combined function increases thedynamic range for achieving gain equalization across the array of signalchannels. In this regard, the functionality of the SOA and VOA can becombined into a single element which we identify as a “ZOA” in thisdisclosure. Such a ZOA 32 is shown at signal channel No. 10 of chip 10Din FIG. 5 and performs the function of adding or attenuating gain of thepropagating channel signal. It should be understood that ZOA 32represents a compromise over a channel AVE combination of a SOA with aVOA in that if the length of a VOA was as long as an SOA, such asillustrated by the dotted line extension 32A in FIG. 5, there would betoo much attenuation per comparable unit length of a VOA and of a SOA.This is because the frequency and attenuation response of a VOA issignificantly greater than the frequency and gain response of a SOA. Inthis embodiment, therefore, employing a ZOA 32, the comparable unitlength is not as long while still providing a sufficient increase indynamic range adjustment to more extensively adjust the signal powerlevels of the channels across the array. Also, ZOAs 32 are useful toapply a minimal amount of gain to the signal channel to render thedevice to have minimal or no insertion loss to the propagating channelsignal. Because of the frequency response of ZOA 32, such a device canbe easily substituted in any embodiment herein for a VOA. Since the gainaspect provided by ZOA 32 is not large, compared to SOAs by theirselves, one alternative embodiment is to place a pair ZOAs 32 in eachsignal channel, one before and one after modulator 14, so thatsufficient gain can be provide to the signal, followed by attenuation toprovide equalization across the channel array, which concept isillustrated in the sixth embodiment of FIG. 7 at signal channel 10. Ofcourse, as in this and other embodiments, these AVE elements would beincluded in other signal channels of the same PIC. A reason why a tandemSOA/VOA 19 and 15 or a ZOA 32 is desirable is that, with the single useof an SOA to achieve gain flattening, there is a limit as to how muchamplification can be realized to perform such a gain function. The gainachieved with an SOA can be increased by making it long in length butthis increases the current requirements on the PIC which may exceed thedesired PIC current budget. Also, more gain in a channel induces moreback reflection and scattered light in the signal channel and theamplification of these back reflections and scattered light within thechannel as well, which can be detrimental to the operation of lasersources 12. ZOA 32 enhances the dynamic range of adjustment of channelgain and helps to eliminate the above problems or issues in this regardso that higher power channels can be attenuated while, concurrently,lower power channels can be amplified. Lastly, the deployment of a ZOA32 in each channel in lieu of a combination, in-tandem VOA/SOA 15 and 19materially reduces the number of on-chip bonding pads required, in thecase here, by one set of pads per channel so that twenty bonding padsare eliminated from the design of chip 10D.

Reference is now made to a sixth embodiment of this invention shown inFIG. 6 comprising TxPIC chip 10E which is the same as the fifthembodiment in FIG. 5 except that the combination SOA 19 and VOA 15 arepositioned before modulator 14. In this embodiment, when these amplitudevarying elements are placed before modulator 14, they can, incombination, produce a type of signal chirp on the resulting modulatedsignal exiting from the modulator. VOA 15, however, cannot affect themodulator signal Q. Again, care must be taken not to drive SOA 19 toohard so as to saturate modulator 14.

Also, as in the case of the fifth embodiment in FIG. 5, a ZOA 32 may beplaced before modulator as shown at signal channel 10 in FIG. 6.

FIG. 7 illustrates a further seventh embodiment comprising TxPIC chip10F where a VOA or SOA 34 and 35 could be positioned on either side of amodulator 14 in each signal channel, or, alternatively, a VOA 34 can bepositioned before modulator 14 and a SOA 35 positioned after modulator14. The positioning of SOAs 34 and 35 on either side of modulator isalso illustrated in patent application, Ser. No. 267,331, supra. Theseembodiments provide for an extended dynamic range to adjust for betterOSNR at the optical receiver while applying some signal equalization orpre-emphasis across the array. A preferred deployment in TxPIC chip 10Fis a VOA or ZOA before or after electro-optic modulator 14 and an SOAafter electro-optical modulator 14. The in-tandem order in which a SOAand a VOA are placed in a PIC signal channel in the direction of channelsignal propagation is determined by the best per channel BER that can beachieved without saturating the modulator.

Reference is now made to an eighth and ninth embodiment shown,respectively, in FIGS. 8 and 9 comprising TxPIC chip 10G and 10H. InFIG. 8 a single multi-functional element (MFE) 36 is placed aftermodulator 14 whereas in FIG. 9 a single multi-functional element (MFE)36 is placed after modulator 14. Such a MFE element has already beendisclosed and discussed in the form of ZOA 32. Such a MFE 36 may performseparate electro-optically applied functions relative to acting upon thelaser source CW light output or the modulated optical signal output ineach signal channel. Other examples of an element 36 performing multiplefunctions comprising a multi-functional element is as a variable opticalattenuator (VOA) or as a photodetector (PD); as a ZOA or as aphotodetector; as a ZOA or as a VOA; or as a ZOA or as a SOA. Anelectro-optic MFE 36 is desirable in PICs because they perform two ormore functions on a channel signal in one or more integrated signalchannels and can include at least two of the following functions:modulate (signal or tone frequency), amplify, attenuate, vary signalamplitude, apply a tagging frequency tone, and provide a tap to monitorpower or other properties or characteristics of the channel signal. Thereasons to employ such MFEs 36 in PICs are primarily two-fold. First, asseparate electro-optic elements in the PIC, they would requireadditional space or chip real estate on the PIC. With a single elementperforming more than one function, less chip space is required ascompared to deploying additional elements in the same chip space.Second, the use of an MFE provides for elimination at least two bondpads on the PIC chip for every on-chip electro-optic element eliminated.While such bond pads are small, PICs are pad-limited in terms of circuitlayouts designed within a predetermined or proscribed chip space orarea.

Reference is now made to FIG. 10 which is a specific embodiment of theninth embodiment in FIG. 9, comprising TxPIC 10H1, and is as well one ofthe more preferred embodiments of the several embodiments illustrated inthis disclosure. As previously noted, supra, it is preferred in oneembodiment to operate all the laser sources 12 at a constant averagecurrent chosen at the beginning of life to provide a thermally stablerelationship between laser sources 12 on the TxPIC which reduces thecomplexity of wavelength locking control of the laser sources byseparating the power control function from the wavelength shiftingevents imposed upon laser source 12. One such event includes varying thebias current operation during laser source operation which effectivealso changes the laser emission wavelength. The aging changes of laserwavelength over life, which change is dominated by monotonic blue shift,can be directly compensated for by laser heater adjustment. Such heatersfor laser sources 12 are illustrated in incorporated patent application,Ser. No. 10/267,330, supra. As previously noted, as a laser source agesover life, the output power of the laser changes thereby altering theincident optical power to the electro-optic modulator 14 over life ineach signal channel path of the TxPIC 10. The resulting changes inphotocurrent in the electro-optic modulator can shift the bias point ofthe electro-optic modulator 14, thereby altering its signal chirp,extinction ratio and waveform distortion with respect to conditions setoptimally at the beginning of life for the on-chip modulators 14.Modulated light output from a electro-optic modulator, such as seen inthe case of FIG. 1, for example, passes through the FPD 16F beforeon-chip multiplexing occurs at optical combiner 20. When the FPD 16Freverse bias is varied to control the individual channel power, forexample, to compensate for changing laser source output power over life,the waveform created by electro-optic modulator 14 can be altered by acharge transport phenomena occurring at FPD 16F when its reverse bias isso varied. This can affect the fidelity of the transmitted waveformthereby introducing changes in the bit error rate (BER) at an opticalreceiver, as the FPD 16F bias changes relative to conditions setoptimally at the beginning of life for the respective modulators 14. Toavoid the foregoing mentioned problems, the following sequence offunctional AVEs in each signal channel of the TxPIC is prescribed where,following laser source 12, the next AVE is the FPD 16F, followed by anelectro-optic modulator 14 as illustrated in FIG. 10. With this sequenceof integrated elements in each signal channel, particularly in the casewhere laser sources 12 are driven at constant bias current for improvedwavelength stability as just mentioned above, laser sources 12 can beset with high bias currents to provide higher than required outputpowers which can then be attenuated by FPD 16F in FIG. 10 topredetermined levels of output power across the laser array so that themodulators 14 continually experience the same power level received fromits corresponding laser source 12. Changes of laser source output poweroccurring over life, such as, monotonic deceasing power over life, canbe compensated for by changing the FPD insertion loss by reducing theapplied bias to the FPD 16F, resulting in approximately constant channeloutput power across the signal channel array as well as resulting inapproximately constant input power to the respective electro-opticmodulators over life. In this manner, the conditions that optimizetransmission performance at beginning of life remain approximatelyunchanged over the life of the TxPIC. Additionally, the modulated lightoutput from electro-optic modulators 14 only propagates throughsubsequent passive optical elements in the TxPIC architecture, e.g., theoptical combiner 20, thereby avoiding possible waveform degradationassociated with charge transport phenomena brought on by a downstreamAVE channel element, such as a photodetector, i.e., channel downstreamof an electro-optic modulator 14. Thus, through this architecture,channel power control is made more independent from interaction withwaveform generation (digital or analog modulation) utilized for datatransport through modulation of modulator 14.

Also, any back reflection from a channel imperfections or from a channelexperiencing a fabricated butt joint, such as the one shown at dashedline 47 in FIG. 10 (which is purely exemplarily of one of many differentplaces in the TxPIC where a butt joint may occur), is formed duringcircuit fabrication existing along the channel path can be circumventedwith improved optical isolation of the laser source. In some fabricationtechniques utilizing MOCVD, for example, with selective area growth orSAG or etch back and then layer regrowth, a butt joint may be formedbetween the front photodetector (FPD) and the electro-optic modulator orbetween the modulators 14 and the optical combiner 20 as in the case inFIG. 10. There are other examples of such formed butt joints that may beformed in “stop and then regrow” techniques along the signal channelsformed in a TxPIC. In any case, the insertion loss of FPD 16F providedat the laser source output and before the modulator input can aid toisolate the laser source 12 from such butt joint back reflections aswell as from the affects of the now-modulated back reflections passingthrough a signal channel electro-optic modulator from a downstream buttjoint at 47 which are then attenuated by FPDs 16F in FIG. 10. Dependingupon the position of the butt joint 47 in the PIC, the isolator 39 maybe positioned in each signal channel between said laser source and saidSOA, or between said SOA and said modulator, or after said modulator.Thus, the MFE in the form of a FPD 16F in the position shown in FIG. 10can perform a plurality of tasks: (1) provide constant power outputuniformity across the channel array over laser source or PIC life; (2)substantially protect of the laser source 12 from back reflected lightin the channel, such as from butt joints at 47 or other back reflectioncaused by fabrication protobations in the PIC circuit; (3) monitor thelaser source output power to make sure it remains at a constant level tothe modulator input as the laser sources age over life; (4) in the caseof the FPD 16F, being directly after the laser source 12, allowsmonitoring of its power at higher level photocurrents than compared tothe case where the modulator 14 intercedes, i.e., compared to the casewhere the FPD 16F is at the output of the modulator 14 (Higherphotocurrent levels relative to dark and leakage currents of the PDimproves accuracy of the estimation of laser source forward output powerwhen the FPD 16F is in the positions shown in FIG. 10 compared to thepositions shown in FIG. 1, with or without the VOAs shown in FIG. 1.);and (5) take on a low frequency modulation, also referred to as a tonefrequency, that provides a tag identification of the channel outputsignal for purposes, inter alia, of deployment in a feedback wavelengthstabilization control system as taught in Pub. No. US 2003/0095736 A1,supra, and as taught in U.S. provisional patent application, Ser. No.60/695,382, filed Jun. 30, 2005 and entitled, “WAVELENGTH LOCKING ANDPOWER CONTROL SYSTEMS IN MULTI-CHANNEL PHOTONIC INTEGRATED CIRCUITS(PICs)”, and its later-to-be filed nonprovisional application, all ofthese applications being incorporated herein by their reference.

Instead of a FPD 16F, a VOA may be employed per channel between thelaser sources 12 and modulators 14 in chip 10H1, as also previouslyillustrated in connection with the embodiment shown in FIG. 2.Therefore, to control laser output power to be constant for purposes ofequalization across the channel array of the TxPIC 10 or 10H1 as well asinsuring constant power input level to associated modulators 14 overlife, a VOA may be employed in place of a FPD in FIG. 10. In such acase, the function of power monitor is not performed in the severaltasks mentioned above with respect to the FPDs 14F. With a VOA placebefore modulators 14 in each channel, the input power of the modulators14 can be maintain in a constant state thereby avoiding largephotocurrent changes to occur in the modulator due to laser source powerlevel changes in its input power as well as be possibly affected byassociated saturation phenomena.

Reference is now made to FIG. 11 which is similar to the secondembodiment of FIG. 4, but is a modified embodiment over FIG. 4 throughthe deployment in TxPIC chip 10A1 of a per channel optical waveguideisolator (OWI) 39 and SOA 36A after laser source 12 and before modulator14. In the embodiment here, an SOA 36A is employed for equalizing thepower output level across the laser array rather than a VOA. In the casehere, back reflections in the signal channels due to previouslymentioned imperfections as well as from a butt joint, such as at 47 inFIG. 11, will now be modulated backward through modulator 14 and thenamplified by SOA 36A. This can be detrimental to the optical spectrumoperation of laser source 12 and the maintenance of its desired emissionwavelength. Thus, a per channel optical waveguide isolator (OWI) 39 isinserted between the outputs of laser sources 12 and SOAs 36A as seen inFIG. 11. Examples of such isolators or the principals of their operationas integrated in PICs, which are also meant here to include, as a group,back reflection optical channel deflectors to deflect undesired backreflected light from the channel path, are illustrated in U.S. Pat. Nos.4,691,983; 4,973,119; 5,428,695; 5,463,705; and 5,663,824, which patentare incorporated herein by their reference.

The deployment of constant average current operation of a TxPICrequires, therefore, separate power control of each signal channel usingan on-chip, integrated variable power control elements, such as, a highdynamic range gain element, such as a per channel SOA, or a high dynamicrange loss element, such as a per channel VOA, or both in the form of aVOA, to provide for power flattening at the TxPIC output as well asconstant optical power input to the modulators.

If the constant average current approach is employed where thestart-of-life output power from the TxPIC laser sources 12 commenceswith initial, substantially highest power laser output, and then, a perchannel VOA may be employed as the power control element tocorrespondingly attenuate all laser source power outputs to the samepower level. As the laser sources age, the lasers will continually losepower so that the reverse bias depth of the VOAs is withdrawn tocontinually maintain the same laser source output power to themodulator. Also, in this case of operating at initial, substantiallyhighest optical loss deprivation applied by the VOAs to thesubstantially highest laser output powers via constant average currentoperation over life, the amount of optical loss across the array isbased from the array channel with the weakest total output power. On theother hand, if SOAs are employed for power flattening, then, the gainprovided in each channel SOA allows an increasing of the power from theweakest of such array channel or channels up to the power level of thestrongest channel power level in the channel array. However, in thiscase, the per channel SOAs add noise to the channel signals and willintroduce signal waveform distortion and further signal chirp and,correspondingly, increasing the channel BER, particularly in the casewhere the per channel SOA follows the channel modulator, as seen in theembodiment of FIG. 3. However, this increase in BER at the opticalreceiver can be counteracted with the use of FEC encoding of thetransmitted channel signals as combined into a PIC WDM output signal.

Reference is now made to a tenth embodiment of this invention which isillustrated in both FIGS. 12 and 13. TxPIC chip 50 in FIG. 12 is similarto previous embodiments in including an AVE or MFE either at the inputor output of modulators 14, or both, but, further, includes on-chipelectro-optic elements A at 52 and B at 54 in output waveguide 23between the output of combiner 20 and output facet 29. Elements 52 and54 are for the purpose of providing attenuation to the optical signalgroup (OSG) on output waveguide 23 of chip 50. As shown in FIG. 13, aplurality of TxPICs 50 may be provided in a single transmitter module 55with each chip 50 having N signal channels. In the example shown here, Nis equal to 10 so that transmitter module 55 includes one hundred signalchannels. The WDM outputs on lines 51 from these ten TxPIC chips 10 arecombined or interleaved in combiner/interleaver 56 for output on opticallink 58 as a single WDM signal. A booster optical amplifier 57 may beprovided at this output to provide gain to the signal beforetransmission on link 58. Amplifier 57 may be a rear earth doped fiberamplifier or one or more cascaded semiconductor optical amplifiersdepending upon the amount of desired gain to be provided to the WDMsignal. In the configuration shown in FIG. 13, it is desired that allthe outputs from the ten TxPIC chips 50 are of substantially the samepower level, i.e., they are at the same output power across output line55 across the array of TxPICs 50. The natural power level fromchip-to-chip will not necessarily be the same even in the case of powerequalization or pre-emphasis provided with an AVE or MFE channel element37 because of the difference in power consumption and insertion lossesamong the several chips 50. In order to achieve pre-emphasis at chip 50outputs, amplitude adjustment of the just-combined WDM signal on eachchip can be adjusted by one or more elements 52 and 54 so that theresultant power across all chip outputs at 51 will be substantially thesame. Thus, the purpose of the output electro-optic elements 52 and 54are to attenuate, or attenuate or amplify, i.e., provide amplitudeadjustment on the optical signal group (OSG) WDM signal from TxPICs 50over a sufficiently wide dynamic range so that the output of themultiple TxPIC chips 50 in transmitter module 55 can be rendered to havesubstantially equalized outputs prior to their presentations atinterleaver or combiner 56.

For the purposes of this disclosure, one or both such electro-opticelements A or both A and B may be utilized in waveguide 23.Electro-optic elements 52 and 54 are preferably at least one phasemodulator or a combination of at least one phase modulator and an SOA,or, respectively, a VOA and an SOA. It is preferred, however, not toemploy electro-absorption-based VOAs because of their bandedge phenomenawhich may adversely affect the WDM signal by applying too much insertionloss. The purpose of two elements 52 and 54 is to achieve a largerdynamic range such as in the range, for example, of approximately 30 dBto 35 dB. Specific options include element 52 comprising a Mach-Zehnderinterferometer (MZI) or multi-mode interference (MMI) switch and element54 is absent. Another option is both elements 52 and 54 comprising aMach-Zehnder interferometer (MZI) or multi-mode interference (MMI)switch. Another option is element 52 comprises an SOA or a gainclamped-SOA (GC-SOA) and element 54 comprises a Mach-Zehnderinterferometer (MZI) or multi-mode interference (MMI) switch or visaversa. A further option is that both elements 52 and 54 comprisein-tandem gain elements comprising SOAs or GC-SOAs toward increasingchip 50 outputs to a common power level across the array of chips 50 inmodule 55. A further option is that both elements are tandem VOAsincreasing the dynamic range toward reducing chip outputs to a commonpower level across the chip array in module 55. A last option is thatone or both elements 52 and 54 can be a MFE of the type as previouslydefined and discussed. The MZI versions of the foregoing options forattenuation can be employed to attenuate via either theelectroabsorption effect or via signal interference provided at the MZIY-coupled output.

In all the foregoing options, the deployment of electro-optic elements37 for at least some signal channels to include an amplificationfunction is desired because it can compensate for any insertion lossbrought about later by electro-optic elements 52 and 54, except in thecase where these elements 52 and 54 are purely gain elements, e.g., intandem SOAs. Further, if chip elements 37 are gain elements, such asSOAs, the option where elements 52 and 54 are purely gain elements isnot highly desirable although possible, because the launch power fromchip 50 may to be too high. Also, in FIG. 12, in the case where one ofthe elements 52 or 54 is a Mach-Zehnder interferometer (MZI), there willresult a gain tilt established across the channel signal spectrum sincesuch interferometer elements are wavelength sensitive. In thisembodiment, it is preferred that VOAs are employed at 37 in each channelwaveguide at the input or output of channel modulators 14 so that anopposite gain tilt can be set across the channel signal spectrum tocompensate for the gain tilt that will occur on the optical signal group(OSG) signal at the MZI element 52 in the chip output waveguide 23.

In summary relative to the embodiment of FIGS. 11 and 12, TxPIC chip 50is to deploy an amplitude adjustment on the WDM output signal or theoptical signal group (OSG) signal from each TxPIC chip 50. Therespective signals combined by multiplexer 20 have all beensubstantially flatten or equalized by means of dynamic adjustment of aAVE or MFE at 37 as explained in the previous described embodiments ofthese integrated elements. However, the power levels of one OSG signalto the next on module output lines 51 (FIG. 13) may be different. Thus,it is desirable to equalize the OSG outputs in lines 51 over all of theTxPICs 50 before their OSG signals are combined or interleaved. Thus, asseen from FIG. 13, if more than one OSG output is to be combined with aplurality of other OSG outputs from other TxPIC chips 50 in a singletransmitter module 55, it is desirable that there be an amplitudeadjustment at the PIC WDM signal output to substantially equalize theOSG outputs among the plural TxPIC chips. Several such embodiments toaccomplish this amplitude adjustment have been discussed in connectionwith FIG. 12. Also, the same amplitude adjustment may be employed foroptical circuit startup where the output from the TxPIC chips would beattenuated to prevent any startup signal testing or calibration signalfrom being transmitted from chips 50 onto optical link 58.

Reference is now made to a multi-signal channel, optical receiverphotonic integrated circuit (RxPIC) chip 140A comprising the eleventhembodiment of this invention which is shown in FIG. 14. Monolithic chip140A comprises an input waveguide 145 for receiving a WDM signal atinput 139 where the signal may be amplified by optional amplifier 142which may be, for example, a SOA or a GC-SOA. The WDM signal is thenpassed onto decombiner 144 which is shown here as an arrayed waveguidegrating (AWG) comprising input slab or free space region 146 and anoutput slab or free space region 150 between which is an array ofgrating arms 148 of different, increasing lengths, ΔL, so that apredetermined phase difference is established in waveguides 21 accordingto the wavelengths λ₁−λ_(N) combined in the incoming WDM signal. Theoutput from output free space region 150 comprises a plurality ofseparated or demultiplexed channel signals λ₁to λ_(N), here N=12, arerespectively provided on a plurality of output waveguides 154 to aplurality of amplitude varying elements 153, shown here as VOAs 153,followed optionally by another electro-optic element 157 and lastly to acorresponding photodetector (PD) 152, shown here PDs 152(1) . . .152(12). Also, a higher order output from output free space region 150may optionally be provided via waveguide 154 to a monitoring photodiode(MPD) 156 for monitoring the output from AWG 144. Elements 157 areintegrated passive polarization dependent loss or gain (PDL/PDG)elements which are shown following each VOA 153 in each signal channelbut, also, may be alternatively positioned before each VOA 153. SuchPDL/PDG elements 157 are passive absorbing regions formed in waveguides151 to provide for more absorption for one polarization mode overanother. More will be said about this below. The different channelsignals exiting AWG 144 will have different intensities due to thedifferent anomalies or imperfections of the chip, for example, such asvarying insertion losses of the AWG 144 and associated waveguides 151.It is important to that the channel signals reach PDs 152 at the samepower level providing similar results as well as sufficiently attenuatedso that they do not saturate either PDs 152 or the transimpedanceamplifies (TIAs) 200, the latter of which is seen in FIG. 16.

As illustrated in FIG. 16, each VOA employs per channel information froma corresponding transimpedance amplifier (TIA) 200 coupled to the outputof each photodetector 152, for example, to set the bias value of VOA 153to insure that each channel signal remains within the dynamic range ofthe optical receiver and does not saturate either photodetector 152 orTIA 200. As a result, the optical transmission system connected to theoptical receiver can afford far greater dynamic range variations whenthe on-chip VOA attenuation is employed thereby extending the signalreach by improving the OSNR and/or reducing the amount of control,necessary specifications and costs of the optical transmission system inthe optical receiver. VOA 153 is operated with a reverse bias applied tooptimize the dynamic range for each channel signal. The attenuationreduces the noise floor rendering the TIA to more definitively definethe sinusoidal or square voltage output from the photodetectorsrepresentative of binary values of 1 and 0 in the electrical signal.VOAs 153 may be an electro-absorption type of VOA, a bandedge type ofVOA or may be a Mach-Zehnder phase type of VOA. Also, photodetector 152may be a bandedge type where the VOA is also a bandedge type. A bandedgeVOA functions like a reverse bias PIN photodiode which operates in theregion of its bandedge. The VOA may also have a shifted bandgap in itsactive region so that the amount of signal loss accomplished by a givenapplied negative voltage will be enhanced. Further, the VOA may be acombination semiconductor optical amplifier/variable optical attenuator(SOA/VOA), or ZOA, where a ZOA is a single electro-optic componentdesigned to operate either as an optical amplifier (SOA) or an opticalattenuator (VOA) depending upon the bias sign applied to the ZOA. A ZOAprovides for even greater enhancement of the optical receiver dynamicrange as well as sensitivity compared to either a VOA or SOA employed byitself. It is within the scope of this invention that AVEs 153 may alsobe multi-functional elements (MFEs) as described in connection with theembodiments, for example, disclosed in FIGS. 8 and 9.

Thus, VOAs 153 in RxPIC chip 140A are employed in the output lines tothe array of PDs 152 to attenuate the individual channel signals forbetter responsivity at PDs 152 and at TIAs 200 and also to compensatefor any gain tilt across the channel signal spectrum. The goal is toensure that the responsivity of PDs 152 is substantially uniform acrossthe PD array so that the array responsivity profile is flat. Then, overthe life of the RxPIC chip, dynamic adjustment can be made to the biasof the respective VOAs 153 to continually maintain the flat profile. Inthe case here, it is important to monitor the photocurrent level perRxPIC channel so that their responsivity is substantially at all of thesame detection level as well as preventing any one channel signal powerfrom saturating either PD 152 or TIA 200, as already indicated above.Also, VOAs 153 may be employed to compensate for gain tilt of an opticalamplifier external of chip 140A provided just prior to its input 139such as illustrated in FIG. 16 at 138. Such an optical amplifier may be,for example, an EDFA, which has a set gain tilt that stays substantiallythe same through life. The on-chip VOAs 153 may be individually andselectively biased to compensate for this gain tilt across the channelsignal spectrum and provide for the gain across the signal spectrum tobe uniform at the outputs of VOAs 153. With this being the initialadjustment of biasing of VOAs 153, further changes can be then made toselective VOA applied biases to provide for flat uniformity inresponsivity across the PD array. Also, if there is any loss differencesintroduced across waveguides 151 from AWG 144 due to varying butt jointlosses for example, in forming different on-chip active regions for VOAs153 and/or for PDs 152, this loss can be compensated for and bringuniformity responsivity across the PD array 152(1) . . . 152(12) throughadjusting of the bias of VOAs 153. Lastly, loss due to shifts in thefrequency response of AWG 144 resulting in different losses in differentsignal channels can also be compensated for by adjusting the bias ofVOAs 153. The aforementioned VOAs 153 and PDs 152 having differentactive layers is accomplished by employing SAG for the growth of one orboth of these two elements to etch back selective areas of semiconductorlayers of the PIC and then regrow their respective active and confininglayers. This approach may be more desired when deploying avalanchephotodiodes (APDs) as photodetectors 153 in chip 140A because it may bepreferred to incorporate at least one butt joint in the growth of RxPICchips 140A in order to grow an additional layer comprising themultiplication layer required for APDs.

Reference is again made to the utilization of an input optical amplifierprior to reception of a WDM signal at an optical receiver in an opticalcommunication network. As previously indicated, such an opticalamplifier 138, shown in FIG. 16, is customarily an EDFA, but may also bean SOA. It is desirable to employ a variable gain EDFA since theadjustment of amplifier gain over time may be necessary to maintain aflat profile across the signal channel spectrum. These types ofamplifiers, however, are quite expensive. On the other hand, with theemployment of on-chip VOAs 153, a fixed gain EDFA 138 may be employed,instead of a variable gain EDFA, at the input to RxPIC chip 140A. Suchan optical amplifier is much less expensive than a variable gain EDFA.In this way, if there is any tilt in the gain across the signalspectrum, the tilt can be compensated by VOAs 153 in the waveguidechannels to PDs 152. Also, in employing VOAs 153, much larger signaldispersion can be tolerated within given OSNR limits. Thus, if theincoming signal has a sufficiently large OSNR, the dynamic range of VOAs153 is sufficient to adjust for PD 152 responsivity and flatness acrossthe incoming demultiplexed channel signals as well as be within thedynamic range of TIA 200. Also, this dynamic range can be extended byemploying an SOA 158 followed by a VOA 153 in each channel waveguide 151as seen in the thirteenth embodiment of RxPIC 140C seen in FIG. 17.Alternatively, a ZOA may be employed in lieu of these two tandemelectro-optic elements. In this case where a combination of an SOA andVOA is employed, as long as the OSNR is at an acceptable minimum, theon-chip VOAs 153 may be utilized to flatten the signals across thesignal spectrum within the dynamic range of TIAs 200 without imposingany flatness criteria on the channel waveguide SOAs 158.

In the embodiment of FIG. 14, employing a single SOA or a GC-SOA 142 foramplification across all the WDM signal channels, there will be apolarization dependent loss (PDL) or gain (PDG) varying from channel tochannel at the outputs onto waveguides 151 from optical decombiner 144.We refer to such kind of optical amplifier device 142 as an opticalsignal group (OSG) amplifier as compared to embodiments where there maybe, for example, a single SOA in each signal channel waveguide, such asa SOA employed in each decombiner output waveguide 151. To compensatefor this PDL or PDG, one approach is to vary the width of VOAs 153 alongtheir length in order to compensate for polarization loss where theirrespective widths depend upon the amount of polarization variation tomore effectively balance or compensate the amount of either the TM modeor the TE mode to more effectively be equal to one another. Thus, thisembodiment comprises the use of chirping of VOA widths to create PDL orPDG skew across the VOA array to compensate for per channel signalvariation from channel to channel due to the polarization tilt that isintroduced by an on-chip OSG amplifier 142. These fixed, chirped amountsof VOA widths can be characterized from a previous fabrication andtesting of outputs from initially manufactured RxPIC chips 140A. Aspreviously mentioned, another way of compensating for this PDL or PDG isto utilize integrated passive PDL/PDG elements 157 before and/or aftereach VOA 153 in each channel output waveguide 151. Such passive elements157 may be an element that is more absorbent of one mode over the othermode. Such absorption quantity can be determined after characterizationof previously fabricated RxPIC chips 140A to determine the width and/orlength of such integrated mode absorption elements.

Reference is now made to the twelfth embodiment of this invention asshown in FIG. 15 for RxPIC 140B. The embodiment of FIG. 15 is the sameas FIG. 14 except that, instead of just the deployment of VOAs 153, ZOAs155, as previously defined herein, may be utilized which would providegreater dynamic range for signal responsivity through a greater range ofdynamic range adjustment via positive and negative bias adjustment ofsuch ZOAs. It is also within the scope of this invention to deploy onlySOAs at 155, as seen in FIG. 16, but is a less likely preferredembodiment. In either case, the foregoing mentioned ways of dealing withPDL or PDG in the embodiment of FIG. 14 may be utilized in theembodiment of FIG. 15 with passive PDL/PDG elements 157 which are alsoalternatively illustrated in FIG. 15.

As shown in FIG. 16, the photocurrent output from PD 152 is provided toTIA 200 which provides an output voltage signal, V_(S), representing, inelectrical form, the modulated channel signal. A portion may be providedas feedback to control circuit 202 to provide a control signal to VOA153 to control the attenuation level of the VOA 153, the gain level ofan SOA, or the level of a ZOA 155, for optimum responsivity at PD 152while preventing PD saturation.

Also, it is within the scope of this invention to provide RxPIC 140 tobe a coolerless RxPIC, that is, there is no direct control over thetemperature of the chip such as with a thermal electric cooler (TEC)and, in fact, chip 140 may be heated to higher operating temperatures,such as, for example, somewhere in the temperature range of 30° C. to85° C. More on such coolerless PIC chips is disclosed in U.S.nonprovisional application, Ser. No. 11/106,875, filed Apr. 15, 2005,which application is incorporated herein by its reference. In this case,temperature sensors may be provided at each VOA 153 to detect thetemperature of each per channel VOA to control its temperature ofoperation and thereby control its attenuation properties over a widetemperature range. In this connection, see U.S. Pat. No. 6,661,963,which is also incorporated herein by its reference.

In another embodiment of this invention, rather than VOAs 153 and PDs152 possibly having different bandgap active regions that may beprovided by employing SAG techniques, VOAs 153 and PDs 152 may share thesame active region which is not ideal situation for their respectiveoperations. The goal is that PDs 152 to have high absorption and apreferred way to accomplish this is to add additional detection lengthto PDs 152. However, the longer their lengths, the slower theirresponsivity. In any case, since these two elements, VOAs 153 and PDs152, share the same active layer or region, their operation might resultin too much of an ON-state operation at VOAs 153 which can result ininsufficient signal absorption at PDs 152. Where these elements share,in integration, the same active layer or region, there needs to be abalance between obtaining sufficient absorption in the array of PDs 152but a sufficiently small ON-state absorption loss at the array of VOAs153 while still providing a sufficient dynamic range of VOA operationthat is useful in setting the dynamic range of the overall opticaltransmission system to provide tolerable BER performance at the opticalreceiver. There are, basically, two ways to solve this balancing issue.One way of accomplishing this is with the standard detector design wherea balance is employed with short-length integrated VOAs 153 and applyinga sufficiently large bias to them to achieve the desired dynamic rangeeven if the operation of the VOA is above its bandedge. Also, the PDs152 are sufficiently made longer in length to provide sufficientresponsivity required to achieve discriminating data interpretation.Where, as in the case here, VOAs 153 and PDs 152 share the same activelayer or region, the photoluminescence bandgap or active layerwavelength, λ_(AL), is designed to be much less than the largest signalchannel wavelength, λ_(i), being transported through waveguides 151 onRxPIC 140 that each include these two serially integrated electro-opticelements 152 and 153, i.e., λ_(AL)<<λ_(i). In this case, VOAs 153 areoperated in the absorption tail of their absorption spectrum and,therefore, independent of channel signal wavelength operation.

A second way of accomplishing this balancing is with the bandedgedetector design, using the absorption effect where λ_(AL)≈λ_(i), byoperating the VOAs near their bandedge so that the absorption of theVOAs 153 can be effective swept in and out to provide a low ON-statewith a high extension ratio within the operating signal bandwidth whilebiasing the PDs 152 deep enough to achieve sufficient signalresponsivity. In this case, operation of VOAs 153 may not be in theabsorption tail so that part of the VOA operating range is deployed forcompensating for varying responsivity at PDs 152. In this approach,there is more flexibility in the designed length of VOAs 153 inwaveguides 151 because there is less ON-state loss and, ideally,potentially more dynamic range of operation. The tradeoff is likely thatthe PDs 152 must be either biased deeper or be designed of longer lengthor, alternatively, sacrifice some level of PD responsivity. It should beunderstood that for photodetectors (PDs), either PIN photodiodes oravalanche photodiodes (APDs) may be employed in these severalembodiments of the invention as set forth in FIGS. 12-15, as previouslyindicated.

While the invention has been described in conjunction with severalspecific embodiments, it is evident to those skilled in the art thatmany further alternatives, modifications, and variations will beapparent in light of the foregoing description. For example, some of theembodiments in the future can be made through silicon technology as thistechnology continually develops to provide light emitting devices, suchas lasers, passive devices such as arrayed waveguide gratings (AWGs) andEchelle gratings and other electro-optic devices integrated into aphotonic integrated circuit. Thus, the invention described herein isintended to embrace all such alternatives, modifications, applicationsand variations as may fall within the spirit and scope of the appendedclaims.

1. A photonic integrated circuit comprising: a chip; a plurality oflasers provided on the chip; a plurality of electro-optic modulatorsprovided on the chip; an optical combiner provided on the chip, theoptical combiner having a plurality of inputs and an output, each of theplurality of inputs being coupled to a corresponding one of theplurality of electro-optic modulators; and a plurality of electro-opticamplitude varying elements provided on the chip, each of the pluralityof electro-optic amplitude varying elements being provided betweencorresponding ones of the plurality of lasers and the plurality ofelectro-optic modulators, wherein each of the plurality of electro-opticamplitude varying elements supplies a corresponding one of a pluralityof optical signals to a respective one of the plurality of electro-opticmodulators, and a bias voltage is applied to each of the plurality ofelectro-optic amplitude varying elements to vary a power level of eachof the plurality of optical signals.
 2. The photonic integrated circuitof claim 1, wherein each of said electro-optic amplitude varyingelements comprises a variable optical attenuator (VOA), a semiconductoroptical amplifier (SOA), an in-series variable optical attenuator (VOA),a semiconductor optical amplifier (SOA), or a combination variableoptical attenuator/semiconductor optical amplifier (ZOA).
 3. Thephotonic integrated circuit of claim 1, wherein each of the plurality ofoptical signals is modulated by a corresponding one of the plurality ofelectro-optic modulators, such that each of a plurality of modulatedoptical signals are supplied to a corresponding one of the plurality ofinputs of the optical combiner, each of the plurality of modulatedoptical signals having substantially the same power level.
 4. Thephotonic integrated circuit of claim 1, wherein each of said pluralityof lasers includes a DFB laser or a DBR laser.
 5. The photonicintegrated circuit of claim 1, wherein each of said plurality ofelectro-optic modulators is an electro-absorption modulator or aMach-Zehnder modulator.
 6. The photonic integrated circuit(PIC) of claim1, wherein said optical combiner is selected from the group consistingof an arrayed waveguide grating (AWG), an Echelle grating, a cascadedMach-Zehnder interferometer, a quasi-selective wavelength star coupler,a power coupler, a star coupler and a multi-mode interference (MMI)coupler.
 7. A photonic integrated circuit comprising: a chip; aplurality of lasers provided on the chip, each of the plurality oflasers supplying a corresponding one of a plurality of optical signals;a plurality of electro-optic modulators provided on the chip, each ofwhich receiving a corresponding one of the plurality of optical signalsand outputting a corresponding one of a plurality of modulated opticalsignals; and a plurality of photodiodes provided on the chip, each ofwhich being configured to receive a corresponding one of the pluralityof modulated optical signals and supply a corresponding one of aplurality of attenuated optical signals, wherein a bias voltage isapplied to each of the plurality of the plurality of photodiodes to varya power level of each the plurality of attenuated optical signals. 8.The photonic integrated circuit of claim 7, wherein each of saidplurality of lasers includes a DFB laser or a DBR laser.
 9. The photonicintegrated circuit of claim 7, wherein each of said plurality ofelectro-optic modulators includes an electro-absorption modulator or aMach-Zehnder modulator.
 10. The photonic integrated circuit of claim 7,further comprising an optical combiner configured to receive theplurality of attenuated optical signals and combine the plurality ofattenuated optical signals into a WDM signal.
 11. A photonic integratedcircuit comprising: a chip; a plurality of lasers provided on the chip;a plurality of electro-optic modulators provided on the chip; an opticalcombiner provided on the chip, the optical combiner having a pluralityof inputs and an output, each of the plurality of inputs being coupledto a corresponding one of the plurality of electro-optic modulators; aplurality of electro-optic amplitude varying elements provided on thechip, each of the plurality of electro-optic amplitude varying elementsbeing provided between corresponding ones of the plurality of lasers andthe plurality of electro-optic modulators, wherein each of the pluralityof electro-optic amplitude varying elements supplies a corresponding oneof a plurality of optical signals to a corresponding one of theplurality of electro-optic modulators; and a plurality of sensors, eachof which being configured to sense a parameter of each of the pluralityof electro-optic amplitude varying elements, the parameter of said eachof the electro-optic plurality of amplitude varying elements beingindicative of an attenuation of said each of the plurality of amplitudevarying elements.
 12. The photonic integrated circuit of claim 11,wherein each of said electro-optic amplitude varying elements includes avariable optical attenuator (VOA), a semiconductor optical amplifier(SOA), an in-series variable optical attenuator (VOA), a semiconductoroptical amplifier (SOA), or a combination variable opticalattenuator/semiconductor optical amplifier (ZOA).
 13. The photonicintegrated circuit of claim 11, wherein each of said plurality of lasersources includes a DFB laser or DBR laser.
 14. The photonic integratedcircuit of claim 11, wherein each of said plurality of electro-opticmodulators includes an electro-absorption modulator or a Mach-Zehndermodulator.
 15. The photonic integrated circuit of claim 11, furthercomprising a feedback loop configured to control a bias voltage appliedto one of said plurality of electro-optic amplitude varying elements.16. The photonic integrated circuit of claim 1, further comprising aplurality of feedback loops, each of which being configured to controlthe bias voltage applied to said each of the plurality of electro-opticamplitude varying elements.